Óxido de ítrio Y2O3 Target

 Y2O3 Target
1. ) Meta de pulverizaça ̃ o óxido de:
CEO2, ND2O3, Sm2O3, UE2O3, Gd2O3, Tb4O7, Dy2O3, Ho2O3, Er2O3, TM2O3, Yb2O3, Lu2O3, Sc2O3, Y2O3, Ta2O5, Nb2O5, Ga2O3, V2O5, ZrO2 dopado com TI, WO3, WO2.9, HfO2, MGO, Al2O3), índio Estanho
2. ) (Boreto de carboneto, nitreto, flúor, o silicieto de cálcio, sulfeto) alvo de pulverizaça ̃ o
LaB6, ZrB2, CrB2, TiB2, HfB2, Mo2B5, Guia2, NbB2, W2B, WB, VB2
TiC, A SiC, WC, WC-CO, CC-Ni, B4C, TaC, ZrC, Cr3C2, HfC, Mo2C, VC
Si3N4, AlN, BN, BN/SiC mistura, HfN, TaN, NbN, ZrN, estanho, VN
A LaF3, CeF3, FDN3, YF3 NaF, KF, BaF2, AlF3, LiF, CaF2, SrF3, SrF2, MgF2
CoSi2, Mo5Si3, MoSi2, Ta5Si3, TaSi2, Nb5o SI3, CrSi NbSi22, Cr3Si HfSi2, autores2, Ti5Si3, ZrSi2, WSi2, VSi2, V3Si NiSi,
CdS, ZnS, ZnS: Mn, Na2S3, Sb2S3, PbS, MOS2, TaS2, WS2
3. ) Meta de pulverizaça ̃ o de metal:
Prata AG, a Iridium, RI, rutênio, RU, La, marcação, Pr, ND, Sm, UE, GD, Tb, Dy Ho, Er, TM, Yb, Lu, Sc, Y, silício, Si, telúrio, Te, bismuto, Bi, estanho, Sn, zinco Zn, boro, B, chumbo, Pb, antimónio, Sb, Crómio, Cr, cobalto, Co, Alumínio, Al, níquel, Ni, titânio, Ti, Tungsten W, molibdénio, Mo, tântalo, Ta, nióbio, Nb, zircónio, Zr, háfnio, IC, vanádio, V, germânio, Ge, em fosfeto de índio, Cobre, Cu, Fe Ferro, Manganês, Mn, magnésio, MG.
4. ) Ligas de pulverização catódica alvo:
AG-Al, AG-Cu, AG-la, AG-Lu, AG-MG, Al-Sm, AG-Sn, Al-AG, Al-Cr, Al-Er Al-Dy Al-Cu,,,,, Al-Mg Al-Mg Al-Gd-Si, Al-Sc, Al-Si, Al-Si-Cu, Al-Sm, Al-Ta, Al-Ti, Al-Mo, Al-ND, Al-V, Al-Y Al-Yb, CE-AG e CE-Cu, CE-GD, CE-Sm, CE-Ti, Co-Al, Co-B, Co-Cr, Co-Cr-Al, Co-Cr-Fe, Co-Fe, Co-Fe-B, Co-Fe-GD, Co-Gd, Co-Ni, Co-Ni-Cr, Co-Tb, Co-V, Co-Zr, Cr-Al, CR-B, Cr-Cu, Cr-Mn, Cr-Ni, Cr-Si, CR-V, Cu-Ge Cu-Ga Cu-Al,,,,, Cu-Zn Cu-In Cu-Ni, Dy-Fe, Dy-Co, Dy-Fe-Co, Fe-Al, Fe-B, Fe-Co, Fe-Gd, Fe-Hf, Fe-Mn, Fe-Ni, Fe-Si, Gd-CE, Gd-Fe, Gd-Fe-Co, Gd-Er-Si, Gd-Tb, Gd-Ti, Ho-Cu, Hf-Fe, Hf-Y In-Sb, In-Sn, In-Zn, LaB6, Mg-Al La-Ni La-Al,,,,, Mg-Gd Mg-Dy Mg-Ca, Mg-In, Mg-ND, Mg-ND-ZR-Y, Mg-Sc, Mg-Sm, Mg-Y, Mn-Ni Mn-Fe Mg-Zr,,,,, Nb-Ti Mo-Si Mo-Cr, ND-AG, ND-Fe-B, Ni-Al, Ni-Cu, Ni-Cr, Ni-Cr-Al, Ni-Cr-Si, Ni-Fe, Ni-Mn, Ni-Ti, Ni-V NI-V-Zr, NiYb, Ni2Yb, Ni3Yb, Ni-Yb, Ni-Zr, Sm-Co Sc-Zr Sc-Ni,,, Sm-Fe, Sm-Zr, Ta-Al, Ti-Al, Ti-Al-Cr, Ti-Al Ti-Al-Y-V, Ti-Co, Ti-Cr, Ti-Ni, Ti-Si, autores2, Ti-Zr, Tb-Dy, Tb-Dy-Fe, Tb-Fe, Tb-Fe-Co, Tb-Gd-Fe-Co, V-Al, V-Co, V-Cr, V-Cu, V-Fe, V-mo, V-Ni, Ti, V-V-Ti-Al, W-Ti, W-Si, Y-Ti, Y-Zr, Zr-Mg Y, Zn-Al, Zr-Al, Zr-CE, Zr-Cu, Zr-Gd, Zr-Si, Zr-Ti, Zr-Y
Materiais de evaporação
La2O3 e CEO2, pr6O11, ND2O3, Sm2O3, Gd2O3, Dy2O3, Er2O3, Sm2O3, Yb2O3, Y2O3, LaF3, CeF3, PrF3, FDN3, SmF3 GdF3, DyF3, ErF3, YbF3, ScF3, YF3, HfO2, CaF2, ZnS, CdS, SiO2, HfO2, ZrO2, TiO2, TiO, Ti2O3, a Ti3O5, Ta2O5, Nb2O5, SiO2, Al2O3, MGO, ZnO, WO3, Bi2O3, Sb2O3, Cr2O3, NiO, CuO, Fe2O3, V2O5, BaTiO3, PrTiO SrTiO33, LaTiO3, MgF2, BaF2, SrF3, CaF2, KF, NaF, ZnS, CdS, ZnSe.